May 6, 2021
Most optical sensors for measuring the surface properties of objects have only a limited field of view. When measuring the surface outside the field of view, either the sensor or the object must be moved or repositioned. It is important to distinguish between the position of the object being measured and the sensor movement, whereby the positioning itself should have as little influence as possible on the measurement result. The higher the sensor resolution and accuracy, the more precise the motion system has to be. In addition to precision, another important requirement in many applications is the degree of automation. Precise positioning and monitored control Surface analysis is often integrated directly into the production line as a quality assurance process. As is often the case in semiconductor manufacturing, for example wafer inspection or the production of flat panels, quality is assessed after almost every process step, necessitating fully automated in-process inspection with object…